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Electronics

 

Typical hydrogen applications in the electronics industry include circuit manufacture, semiconductor production, quartz melting, polysilicon production, epitax wafer production, and fiber optic production. Due to the inherent requirement for high purity, electronics companies generally require liquid hydrogen, gas vaporized from liquid, or lower purity H2 that is purified at the customer's site. Below is an illustration of hydrogen usage within the electronics industry:

Process

Polysilicon Production

Crystal Growth

Epitaxy

Etching

Oxidation

Diffusion

Chemical Vapor Deposition

Ion Implantation

Annealing

Bonding

H2 Use

Reducing Agent

Atmosphere

Reducing Medium and/or Carrier Gas

Atmosphere

H2 and O2 combined to make pyrogenic steam

Carrier Gas

Carrier Gas and Reducing Atmosphere

Dilution of dopant-bearing gases

Atmosphere

Atmosphere

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