Typical hydrogen applications in the electronics industry include circuit manufacture, semiconductor production, quartz melting, polysilicon production, epitax wafer production, and fiber optic production. Due to the inherent requirement for high purity, electronics companies generally require liquid hydrogen, gas vaporized from liquid, or lower purity H2 that is purified at the customer's site. Below is an illustration of hydrogen usage within the electronics industry:
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Process
Polysilicon Production
Crystal Growth
Epitaxy
Etching
Oxidation
Diffusion
Chemical Vapor Deposition
Ion Implantation
Annealing
Bonding |
H2 Use
Reducing Agent
Atmosphere
Reducing Medium and/or Carrier Gas
Atmosphere
H2 and O2 combined to make pyrogenic steam
Carrier Gas
Carrier Gas and Reducing Atmosphere
Dilution of dopant-bearing gases
Atmosphere
Atmosphere |
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